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Daneshvar, Hamed, Safavi, Mir Saman, Khalili, Vida, Khalil-Allafi, Jafar. (1399). Influence of aging temperature on phase transformation and mechanical behavior of NiTi thin films deposited by magnetron sputtering technique. , 53(1), 15-22. doi: 10.22059/jufgnsm.2020.01.03
Hamed Daneshvar; Mir Saman Safavi; Vida Khalili; Jafar Khalil-Allafi. "Influence of aging temperature on phase transformation and mechanical behavior of NiTi thin films deposited by magnetron sputtering technique". , 53, 1, 1399, 15-22. doi: 10.22059/jufgnsm.2020.01.03
Daneshvar, Hamed, Safavi, Mir Saman, Khalili, Vida, Khalil-Allafi, Jafar. (1399). 'Influence of aging temperature on phase transformation and mechanical behavior of NiTi thin films deposited by magnetron sputtering technique', , 53(1), pp. 15-22. doi: 10.22059/jufgnsm.2020.01.03
Daneshvar, Hamed, Safavi, Mir Saman, Khalili, Vida, Khalil-Allafi, Jafar. Influence of aging temperature on phase transformation and mechanical behavior of NiTi thin films deposited by magnetron sputtering technique. , 1399; 53(1): 15-22. doi: 10.22059/jufgnsm.2020.01.03

Influence of aging temperature on phase transformation and mechanical behavior of NiTi thin films deposited by magnetron sputtering technique

Journal of Ultrafine Grained and Nanostructured Materials
دوره 53، شماره 1، شهریور 2020، صفحه 15-22    اصل مقاله (1.07 M)
نوع مقاله: Research Paper
شناسه دیجیتال (DOI): 10.22059/jufgnsm.2020.01.03
نویسندگان
Hamed Daneshvar1؛ Mir Saman Safavi1؛ Vida Khalili2؛ Jafar Khalil-Allafi* 1
1Research Center for Advanced Materials, Faculty of Materials Engineering, Sahand University of Technology, Tabriz, Iran
2Department of Materials Science and Engineering, University of Bonab, Bonab, Iran.
چکیده
In this study, NiTi thin films were deposited on the glass and NaCl substrates by means of magnetron sputtering method. The influence of aging temperature, over the range 300-500 oC, on phase transformation and mechanical properties of the sputtered NiTi thin films were studied by differential scanning calorimetry (DSC) and nano-indentation assay, respectively. The DSC curves showed that the aged specimens at 350, 400, and 500°C underwent two steps transformation during cooling process while a three steps transformation has been observed for the film aged at 450°C. This behavior clearly demonstrated the heterogeneity in chemical composition and microstructure of the sputtered thin film, which consequently resulted in the martensitic transformation of R and remained B2 to B19' within two steps. According to nano-indentation analysis results, a peak point at aging temperature of 450°C is reached. The temperature hysteresis of all aged films was about 1°C, which can be considered as a positive sign for sensor application.
کلیدواژه‌ها
NiTi thin film؛ Magnetron sputtering؛ Aging temperature؛ Mechanical behavior؛ Phase transformation؛ sensor
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